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Surface Spectroscopy
The aim of a static SIMS investigation is the analysis of the original, non-modified surface composition.
As SIMS in principle is a destructive technique this means that the contribution of those secondary ions to the spectrum originating from already bombarded surface areas to the spectrum must be negligible. This quasi non-destructive surface analysis can be achieved by the application of very low primary ion dose densities. Surface Spectroscopy provides detailed elemental and molecular information from the outer monolayers.
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High sensitivity in the ppm/ppb range |
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High mass resolution and accuracy even on |
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insulating samples |
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High mass range |
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