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Static Depth Profiling
In LEIS the majority of the ions detected are scattered at the surface. Those scattered from atoms below the surface lose additional energy proportional to the depth at which the scattering occurred. By measuring this energy loss, the elemental composition of sub-surface layers is determined non-destructively. This static depth profiling provides information down to a depth of 10 nm. This mode also allows a quantitative measurement of the thickness of organic overlayers such as Langmuir-Blodgett films or self-assembled monolayers.
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