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3D Analysis
The visualisation of 3D sample structures is possible by combining spectral, imaging and depth information. 3D Analysis is ideal for the investigation of complex and unknown structures or defects.
In particular the composition, shape and position of features and defects can be visualised.
Applications include:
Manufactured structures: TFT displays...
Defect Analysis: buried particles...
Material Science: grain boundaries, diffusion...
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Parallel mass detection |
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High depth resolution |
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High image resolution |

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