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TOF-SIMS Products The flexible, high precision sample manipulators as well as the perfect charge compensation allow the analysis of virtually all kinds of samples, making our instruments the most flexible SIMS tools in the market. Due to the modular design, the instruments can be configured with a selection of optimised ion guns, sample preparation facilities and a variety of special accessories in order to address even the most challenging analytical tasks. The computer control of all instrument functions and parameters ensures ease-of-use and a high level of automation. TOF.SIMS 5 Multi-purpose SIMS instrument for industry and research. TOF.SIMS 300 Designed for the demands of the semiconductor industry. TOF.SIMS 300 R The next generation metrology tool. Customised Systems Special configurations include sample preparation chambers, combinations with other analytical techniques, Laser-SNMS. |
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